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			 PECVD
  PECVD
		
	
	
		   
		   
		
	
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 PECVD
  PECVD
	위・아래
	삭제
	복제
	복제전송
	텍스트기본스타일
	
		
			
		
	
	
		   
		   
		
	
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| Type | Products | 
| Cluster | Cluster System for PECVD Silicon Layer(Cluster CVD-300) | 
| PECVD-PVD Cluster System for Graphene Synthesis (Graphene Cluster Lab 200) | |
| Batch | ICP CVD System for Graphene and Boron Carbide Layers(PECVD Lab 200-(Ref1) | 
| PECVD System for Diamondlike Carbon(DLC PECVD Lab-100D) | |
| PECVD System for OLED Barrier Layers(EL-PECVD Lab-100) | |
| PECVD System with High Density Plasma(PECVD Lab-100O) | |
| PECVD System for Low Temp. CNTs Synthesis(PECVD Lab-100-N) (ref1), (ref2), (ref3) (ref4), (ref5) | |
| PECVD System for Solar Cell AR Coatings(PECVD Lab-300) | |
| Large scale of plasma surface Modification and PECVD system (PECVD-B2600) | |
| Thermal CVD system for nanowire synthesis(PECVD Nano Lab-100)-(Ref1) | |
| PEALD System for R&D applications(PEALD-150S1) | |
| PECVD System including LPCVD Function for Large Area Deposition(CVD-1000S) | 


